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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document by MPX2100/D
100 kPa On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensors
MPX2100 MPX2101 SERIES
Motorola Preferred Device
The MPX2100 and MPX2101 series device is a silicon piezoresistive pressure sensors providing a highly accurate and linear voltage output -- directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. Features * Temperature Compensated Over 0C to + 85C * Unique Silicon Shear Stress Strain Gauge * Easy to Use Chip Carrier Package Options * Available in Absolute, Differential and Gauge Configurations * Ratiometric to Supply Voltage * 0.25% Linearity (MPX2100D) Application Examples * Pump/Motor Controllers * Robotics * Level Indicators * Medical Diagnostics * Pressure Switching * Barometers * Altimeters Figure 1 illustrates a block diagram of the internal circuitry on the stand-alone pressure sensor chip.
VS 3 THIN FILM TEMPERATURE COMPENSATION AND CALIBRATION CIRCUITRY
0 to 100 kPa (0 to 14.5 psi) 40 mV FULL SCALE SPAN (TYPICAL)
BASIC CHIP CARRIER ELEMENT CASE 344-15, STYLE 1
DIFFERENTIAL PORT OPTION CASE 344C-01, STYLE 1 NOTE: Pin 1 is the notched pin.
X-ducer SENSING ELEMENT
2 4
Vout+
PIN NUMBER
Vout-
1 2
Gnd +Vout
3 4
VS -Vout
1 GND
Figure 1. Temperature Compensated Pressure Sensor Schematic VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the X-ducer is directly proportional to the differential pressure applied. The absolute sensor has a built-in reference vacuum. The output voltage will decrease as vacuum, relative to ambient, is drawn on the pressure (P1) side. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum (P2) side relative to the pressure (P1) side.
Preferred devices are Motorola recommended choices for future use and best overall value.
Senseon and X-ducer are trademarks of Motorola, Inc. REV 6
Motorola Sensor Device Data (c) Motorola, Inc. 1997
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MPX2100 MPX2101 SERIES
MAXIMUM RATINGS
Rating Overpressure(8) (P1 > P2) Burst Pressure(8) (P1 > P2) Storage Temperature Operating Temperature Symbol Pmax Pburst Tstg TA Value 400 1000 - 40 to +125 - 40 to +125 Unit kPa kPa C C
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25C unless otherwise noted, P1 > P2)
Characteristic Pressure Range(1) Supply Voltage(2) Supply Current Full Scale Span(3) Offset(4) MPX2100A, MPX2100D, MPX2101D MPX2101A MPX2100D, MPX2101D MPX2100A MPX2101A Symbol POP VS Io VFSS Voff Min 0 -- -- 38.5 37.5 -1.0 - 2.0 - 3.0 -- - 0.25 - 1.0 - 0.5 - 2.0 -- -- -1.0 -1.0 1000 1400 -- -- -- Typ -- 10 6.0 40 40 -- -- -- 0.4 -- -- -- -- 0.1 0.5 -- -- -- -- 1.0 20 0.5 Max 100 16 -- 41.5 42.5 1.0 2.0 3.0 -- 0.25 1.0 0.5 2.0 -- -- 1.0 1.0 2500 3000 -- -- -- Unit kPa Vdc mAdc mV mV
Sensitivity Linearity(5) MPX2100D MPX2100A MPX2101D MPX2101A
V/P -- --
mV/kPa %VFSS
Pressure Hysteresis(5) (0 to 100 kPa) Temperature Hysteresis(5) (- 40C to +125C) Temperature Effect on Full Scale Span(5) Temperature Effect on Offset(5) Input Impedance Output Impedance Response Time(6) (10% to 90%) Warm-Up Offset Stability(9)
-- -- TCVFSS TCVoff Zin Zout tR -- --
%VFSS %VFSS %VFSS mV ms ms %VFSS
MECHANICAL CHARACTERISTICS
Characteristic Weight (Basic Element Case 344-15) Common Mode Line Pressure(7) Symbol -- -- Min -- -- Typ 2.0 -- Max -- 690 Unit Grams kPA
NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. * TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Common mode pressures beyond specified may result in leakage at the case-to-lead interface. 8. Exposure beyond these limits may cause permanent damage or degradation to the device. 9. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
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Motorola Sensor Device Data
MPX2100 MPX2101 SERIES
LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 2) or (2) a least squares best line fit. While a least squares fit gives the "best case" linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the "worst case" error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Motorola's specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure.
LEAST SQUARES FIT RELATIVE VOLTAGE OUTPUT EXAGGERATED PERFORMANCE CURVE LEAST SQUARE DEVIATION
STRAIGHT LINE DEVIATION
END POINT STRAIGHT LINE FIT
OFFSET 0 50 PRESSURE (% FULLSCALE) 100
Figure 2. Linearity Specification Comparison
ON-CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the output characteristics of the MPX2100 series at 25C. The output is directly proportional to the differential pressure and is essentially a straight line. The effects of temperature on Full Scale Span and Offset are very small and are shown under Operating Characteristics.
40 35 OUTPUT (mVdc) 30 25 20 15 10 5 0 -5
VS = 10 Vdc TA = 25C P1 > P2 MAX
TYP
SPAN RANGE (TYP) MIN
kPa PSI
0
25 3.62
50 7.25
75 10.87
100 14.5
OFFSET (TYP)
Figure 3. Output versus Pressure Differential
SILICONE GEL DIE COAT WIRE BOND
WIRE BOND
LEAD FRAME
DIFFERENTIAL/GAUGE ELEMENT P2
DIE BOND
LEAD FRAME
Figure 4. Cross-Sectional Diagrams (Not to Scale)
Figure 4 illustrates the absolute sensing configuration (right) and the differential or gauge configuration in the basic chip carrier (Case 344-15). A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm.
The MPX2100 series pressure sensor operating characteristics and internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application.
Motorola Sensor Device Data
EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE
ABSOLUTE ELEMENT P2
DIFFERENTIAL/GAUGE STAINLESS STEEL DIE METAL COVER P1 EPOXY CASE
SILICONE GEL ABSOLUTE DIE COAT DIE P1
STAINLESS STEEL METAL COVER EPOXY CASE
EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE
DIE BOND
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MPX2100 MPX2101 SERIES
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing the silicone gel which isolates the die. The differential or gauge sensor is designed to operate with positive differential pressure
Part Number MPX2100A MPX2100DP MPX2100AP MPX2100GVP MPX2100AS MPX2100GVS MPX2100ASX MPX2100GVSX MPX2100GSX MPX2101GSX MPX2100GP MPX2100D MPX2101A MPX2101DP MPX2101AP MPX2101GVP MPX2101GP
applied, P1 > P2. The absolute sensor is designed for vacuum applied to P1 side. The Pressure (P1) side may be identified by using the table below:
Case Type 344-15C 344C-01 344B-01 344D-01 344E-01 344A-01 344F-01 344G-01
Pressure (P1) Side Identifier Stainless Steel Cap Side with Part Marking Side with Port Attached Stainless Steel Cap Side with Port Attached Stainless Steel Cap Side with Port Attached Stainless Steel Cap
ORDERING INFORMATION MPX2100 series pressure sensors are available in absolute, differential and gauge configurations. Devices are available in the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure connections.
MPX Series Device Type DiT Basic Element Options Oi Absolute, Differential Case Type C T Case 344-15 Order Number MPX2100A MPX2100D MPX2101A MPX2100DP MPX2101DP MPX2100AP MPX2100GP MPX2101AP MPX2101GP MPX2100GVP MPX2101GVP MPX2100AS MPX2100GS MPX2100GVS MPX2100ASX MPX2100GSX MPX2101GSX MPX2100GVSX Device Marking MPX2100A MPX2100D MPX2101A MPX2100DP MPX2101DP MPX2100AP MPX2100GP MPX2101AP MPX2101GP MPX2100GVP MPX2101GVP MPX2100A MPX2100D MPX2100D MPX2100A MPX2100D MPX2101D MPX2100D
Ported Elements
Differential Absolute, Gauge
Case 344C-01 Case 344B-01
Gauge Vacuum Absolute, Gauge Stove Pipe Gauge Vacuum Stove Pipe Absolute, Gauge Axial
Case 344D-01 Case 344E-01 Case 344A-01 Case 344F-01
Gauge Vacuum Axial
Case 344G-01
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Motorola Sensor Device Data
MPX2100 MPX2101 SERIES
PACKAGE DIMENSIONS
NOTES:
C R M B -A- N
PIN 1
1 2 3 4
POSITIVE PRESSURE (P1)
1. DIMENSIONING AND TOLERANCING PER ASME Y14.5M, 1994. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.016 0.020 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30_ NOM 0.475 0.495 0.430 0.450 MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.41 0.51 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30_ NOM 12.07 12.57 10.92 11.43
L
-T- J
SEATING PLANE POSITIVE PRESSURE (P1)
G F
4 PL
D
0.136 (0.005)
M
TA
M
DIM A B C D F G J L M N R
STYLE 1: PIN 1. 2. 3. 4.
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344-15 ISSUE W
PORT #2 VACUUM PRESSURE (P2)
C
POSITIVE PRESSURE (P1) PIN 1
A
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G J K N R S V INCHES MIN MAX 0.690 0.720 0.245 0.255 0.780 0.820 0.016 0.020 0.048 0.064 0.100 BSC 0.014 0.016 0.345 0.375 0.300 0.310 0.178 0.186 0.220 0.240 0.182 0.194 GROUND + OUTPUT + SUPPLY - OUTPUT MILLIMETERS MIN MAX 17.53 18.28 6.22 6.48 19.81 20.82 0.41 0.51 1.22 1.63 2.54 BSC 0.36 0.41 8.76 9.53 7.62 7.87 4.52 4.72 5.59 6.10 4.62 4.93
-B-
V
12 34
K J R
SEATING PLANE
S G F D 4 PL 0.13 (0.005)
M
N
-T-
TB
M
STYLE 1: PIN 1. 2. 3. 4.
CASE 344A-01 ISSUE B
Motorola Sensor Device Data
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MPX2100 MPX2101 SERIES
PACKAGE DIMENSIONS -- CONTINUED
SEATING PLANE
-T- R H N
PORT #1 POSITIVE PRESSURE (P1)
-A- U L
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 1.145 1.175 0.685 0.715 0.305 0.325 0.016 0.020 0.048 0.064 0.100 BSC 0.182 0.194 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.230 0.250 0.220 0.240 0.910 BSC MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 7.75 8.26 0.41 0.51 1.22 1.63 2.54 BSC 4.62 4.93 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.10 23.11 BSC
-Q-
B
12 34
PIN 1
K S F G D 4 PL 0.13 (0.005)
-P- 0.25 (0.010) J C
M
TQ
S
DIM A B C D F G H J K L N P Q R S U
M
TS
S
Q
S
STYLE 1: PIN 1. 2. 3. 4.
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344B-01 ISSUE B
V R
PORT #2 PORT #1
-A- U W H
PORT #2 VACUUM (P2)
L
PORT #1 POSITIVE PRESSURE (P1)
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G H J K L N P Q R S U V W INCHES MIN MAX 1.145 1.175 0.685 0.715 0.405 0.435 0.016 0.020 0.048 0.064 0.100 BSC 0.182 0.194 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.063 0.083 0.220 0.240 0.910 BSC 0.248 0.278 0.310 0.330 MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 10.29 11.05 0.41 0.51 1.22 1.63 2.54 BSC 4.62 4.93 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 1.60 2.11 5.59 6.10 23.11 BSC 6.30 7.06 7.87 8.38
N
-Q-
SEATING PLANE
B
SEATING PLANE PIN 1
1234
-P- -T- J C 0.13 (0.005)
M
K
S
-T-
0.25 (0.010)
M
TQ
S G D 4 PL
F
TS
S
Q
S
STYLE 1: PIN 1. 2. 3. 4.
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344C-01 ISSUE B
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Motorola Sensor Device Data
MPX2100 MPX2101 SERIES
PACKAGE DIMENSIONS -- CONTINUED
-A- -T- R N -Q-
SEATING PLANE PORT #2 VACUUM (P2)
U L H
POSITIVE PRESSURE (P1)
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 1.145 1.175 0.685 0.715 0.305 0.325 0.016 0.020 0.048 0.064 0.100 BSC 0.182 0.194 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.158 0.230 0.250 0.220 0.240 0.910 BSC MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 7.75 8.26 0.41 0.51 1.22 1.63 2.54 BSC 4.62 4.93 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.10 23.11 BSC
B
12 34
K S
PIN 1
DIM A B C D F G H J K L N P Q R S U
C J -P- 0.25 (0.010)
M
F TQ
S
G D 4 PL 0.13 (0.005)
M
TS
S
Q
S
STYLE 1: PIN 1. 2. 3. 4.
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344D-01 ISSUE B
PORT #1 POSITIVE PRESSURE (P1)
C
BACK SIDE VACUUM (P2)
A
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G J K N R S V INCHES MIN MAX 0.690 0.720 0.245 0.255 0.780 0.820 0.016 0.020 0.048 0.064 0.100 BSC 0.014 0.016 0.345 0.375 0.300 0.310 0.178 0.186 0.220 0.240 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. MILLIMETERS MIN MAX 17.53 18.28 6.22 6.48 19.81 20.82 0.41 0.51 1.22 1.63 2.54 BSC 0.36 0.41 8.76 9.53 7.62 7.87 4.52 4.72 5.59 6.10 4.62 4.93
-B-
V
43 21 PIN 1
K J R
SEATING PLANE
S G F D 4 PL 0.13 (0.005)
M
N
-T-
TB
M
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344E-01 ISSUE B
Motorola Sensor Device Data
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MPX2100 MPX2101 SERIES
PACKAGE DIMENSIONS -- CONTINUED
-T- C E A U -Q-
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 1.080 1.120 0.740 0.760 0.630 0.650 0.016 0.020 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.182 0.194 MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 16.00 16.51 0.41 0.51 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 4.62 4.92
V
N R
PORT #1 POSITIVE PRESSURE (P1)
B
-P- 0.25 (0.010)
M
PIN 1
TQ
M
4
3
2
1
S K
DIM A B C D E F G J K N P Q R S U V
J
F D 4 PL 0.13 (0.005)
G
STYLE 1: PIN 1. 2. 3. 4. GROUND V (+) OUT V SUPPLY V (-) OUT
M
TP
S
Q
S
CASE 344F-01 ISSUE B
-T- C E
POSITIVE PRESSURE (P1)
A U
-Q-
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 1.080 1.120 0.740 0.760 0.630 0.650 0.016 0.020 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.182 0.194 MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 16.00 16.51 0.41 0.51 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 4.62 4.92
V
N R
B
PORT #2 VACUUM (P2)
PIN 1
-P- 0.25 (0.010)
M
TQ
M
1
2
3
4
S K
DIM A B C D E F G J K N P Q R S U V
J
F D 4 PL 0.13 (0.005)
G
M
TP
S
Q
S
STYLE 1: PIN 1. 2. 3. 4.
GROUND V (+) OUT V SUPPLY V (-) OUT
CASE 344G-01 ISSUE B
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Motorola Sensor Device Data
MPX2100 MPX2101 SERIES
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer.
Motorola Sensor Device Data
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MPX2100 MPX2101 SERIES
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MPX2100/D Motorola Sensor Device Data

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